TELES7DEPOSHIELD

本项目下位机控制系统使用PLC作为现场控制站，它接收由现场设备(如变送器、传感器、水泵)传来的信号，按照选定的控制策略计算所需要控制量，并传送给现场的执行器，同时完成顺序控制、定时控制等功能[6]。结合3G通信模块，PLC进一步完成数据的上传和反馈信息的接受与响应，保障系统的稳定运行。PLC(Programmable Logic Controller)，即可编程逻辑控制器，一种数字运算操作的电子系统，专用于工业过程控制中。它采用一类可编程的存储器，用于其内部程序存储，执行逻辑运算，顺序控制，计数，定时与算术操作等面向用户的指令，并通过数字量或模拟量输入/输出控制各种类型的机械设备或生产过程

TEL ES1810-121085-17 DEPO SHIELD
TEL ES1810-121190-12 ESC LOWER ELECTRODE 8N (PB-UP)
TEL ES1810-121898-13 SHIELD DEPO LOWER-Y
TEL ES1810-121899-12 PLATE HAUST T6 H-Y
TEL ES1810-220986-14 INSULATING PIPE (8K-ESC)
TEL ES1810-221024-14 UPPER COOLING PLATE
TEL ES1810-221063-14 HAUST RING B(8K-ESC)
TEL ES1810-221470-24 UPPER ELECTRODE (8K-180)
TEL ES1810-222811-11 INSULATOR UPPER
TEL ES1810-223289-13 SLIT T PLATE W1. 6P3.1 (GROUND)
TEL ES1810-223352-11 COVER WALL CHAMBER BOTTOM (GND)
TEL ES1810-223352-11 COVER WALL CHAMBER BOTTOM (GND)
TEL ES1810-224511C11 FOCUS RING 8-NW-2(8K-ESC)
TEL ES1810-225123-11 FOCUS RING
TEL ES1810-322044-11 CENTERING W/MESH (4")
TEL ES1810-322129-12 N RING A (8K-ESC)
TEL ES1810-323416-11 RING LABYRINTH(IPB)
TEL ES1810-323442-11 O-RING SHIELD A (IPB)(P/CGAP)
TEL ES1810-323444-11 O-RING SHIELD B (IPB) (P/C GAP)
TEL ES1810-323445-11 O-RING SHIELD B (IPB) (P/C GAP)
TEL ES1810-323465-11 HOLDER CERAMIC IEM B
TEL ES1810-323466 -11 HOLDER CERAMIC IEM C
TEL ES1810-323467-13 RF ROD(IPB)
TEL ES1810-323759-13 LIFTER X (8KI-ESC)
TEL ES1810-323760-12 LIFTER GUIDE (8KI-ESC)
TEL ES1810-323783-11 RF ConNECTOR A2 (IPB)
TEL ES1810-323897-11 RING PROTECT
TEL ES1810-324233-12 HOLDER ISOLATION GND ROD
TEL ES1810-324276-12 PIN LIFTER
TEL ES1810-324964-1 BELLOWS COVER
TEL ES1810-325059-11 PIN LIFTER ALUMINIUM
TEL ES1810-326611-11 WINDOW PLATE
TEL ES1810-327364-11 PTFE HOLDER
TEL ES1810-328005-11 COVER,PROTECT,ESC
TEL ES1810-328123-11 BELLOWS LIFTER
TEL ES1810-329064-12 WINDOW, AL-3-Y -
TEL ES1810-329078-11 COVER, SCREW A-AL-Y
TEL ES1810-329079-11 COVER, SCREW B - AL
TEL ES1810-424823-12 FEED TERMINAL
TEL ES1810-424835-12 SPRING B(ESC-3)
TEL ES1810-424945-16 SUPPORT GUIDE (8K-ESC)
TEL ES1810-424947-12 LIFTER SUPPORT (8K-ESC)
TEL ES1810-424955-11 RF ROD
TEL ES1810-425089-11 LIFTER STOPPER A (8K-ESC)
TEL ES1810-426215-11 TEFLON CAP B
TEL ES1810-426886-11 SCREW LIFTER (8KI-ESC)
TEL ES1810-426982-12 TEFLON RING
TEL ES1810-427260-11 CAP
TEL ES1810-427469-11 SCREW BLANK
TEL ES1810-427566-12 RF ConNECTOR B2 (IPB)
TEL ES1810-427841-12 LEVER
TEL ES1810-427842-12 STOPPER
TEL ES1810-427859-12 RF BLOCK TYPE B
TEL ES1810-427905-11 BLIND RF BLOCK(INSULATOR)
TEL ES1810-428050-11 FITTING INLET GAS B
TEL ES1810-428121-11 CREW BLANK
TEL ES1810-428129-11 SHIELD WINDOW
TEL ES1810-428233-12 BAFFLE MTG SCREW M3 X 12 AH-V50
TEL ES1810-428245-12 BAFFLE MTG SCREW M3X5 AH-V50
TEL ES1810-428336-11 TERMINAL, HIGH VOLTAGE
TEL ES1810-428520-12 PIN BOTTOM ELECTRODE SIDE WALL (0.5DIA)
TEL ES1810-428715-12 CAP ALUMINIUM 2
TEL ES1810-428806-11 UV CUT FILM (VIEW PORT)
TEL ES1810-428943-11 SUPPORT LIFTER 4 (IPB)
TEL ES1810-429126-11 GAS LINE P/C-2-UP (IPU)
TEL ES1810-429138-11 H ConNECTION TUNE (UP)(IPB)
TEL ES1810-429291-11 PIPE GAS HE
TEL ES1810-429649-11 PUSHER LIFTER (PTFE) 3
TEL ES1810-429707-12 UPPER ARM WIRE 180316 NYLON
TEL ES1810-429708-11 WIRE FOR ROBOT ARM
TEL ES1810-429709-11 WIRE FOR ROBOT ARM
TEL ES1810-430038-11 PLATE HOT BUSSBAR(RF)
TEL ES1810-430333-12 PIN FOR NEW UPPER COOLING BODY
TEL ES1810-431227-11 CAP C/P(MNT) For 85 SCCM UEL.
TEL ES1810-431239-11 PIN,LOCATING F/R TYPE C..S85DI.
TEL ES1880-020093-16 POWER SPLITTER
TEL ES1880-020094-15 MATCHER, MFM-20SA2
TEL ES1880-020100-12 BALL SCREW GZ1504ES-ZAPR-0211*0166
TEL ES1880-020101-12 BALL SCREW GZ1504ES-ZAPR-0191*0116
TEL ES1880-027197-11 AIR CYLINDER CDJ2B16DA-E5161
TEL ES1880-027247-12 BALL SCREW W1502-215X-C5T6
TEL ES1880-027248-12 BALL SCREW W1502-216X-C5T6
TEL ES1880-027504-11 AIR CLYINDER UC2-40-40-B2
TEL ES1881-022002-19 PCB SYSTEM I/O 2 (ATM/MAIN SUB 06&07)
TEL ES1881-022004-1C PCB EPD MonITOR BOARD (MAINTE CTLER)
TEL ES1881-022005-52 PCB T UNIT INTCON BOARD (DTM)
TEL ES1881-022006-13 PCB VAC INTCON BOARD
TEL ES1881-022018-17 PCB U/C IF BOARD(MAINTE CTLER)
TEL ES1881-022019-14 PCB REPEATER BOARD
TEL ES1881-022047-56 PCB VAC ConTROL BOARD 2 IEM I/L (L/L1)
TEL ES1881-022047-57 PCB VAC ConTROL BOARD 2 IEM I/L (L/L1)
TEL ES1881-022047-72 PCB VACUUM ConTROL BOARD 2
TEL ES1881-022048-11 PCB CHAM INTCON BOARD 2 (E/S)
TEL ES1881-022060-26 PCB EPD MonITOR BOARD 2(ESC)
TEL ES1881-022071-21 PCB AC DIST BOARD (HAS)
TEL ES1881-022075-11 PCB AGV MODE SW INTCON BOARD(ATM)
TEL ES1881-022118-28 PCB TSBC-V30B(SUB1)K8 (ATM/MAIN SUB 01)
TEL ES1881-022126-12 PCB CHAM INTCON BOARD 3 (P/C)
TEL ES1881-022132-21 PCB ANALOG MonITOR BOARD UTN(TMP)
TEL ES1881-022135-41 PCB OPERATOR IF BOARD 2 IEM (ATM/OPER IF)
TEL ES1881-022136-11 PCB OPE-PANE RELAY BOARD 3(MAINTE CTLER)
TEL ES1881-022137-11 PCB OPE-PANE RELAY BOARD 3(I/L)
TEL ES1881-022141-12 PCB RF ConTROL BOARD 4 (RF RACK)
TEL ES1881-022142-11 PCB GAS IF BOARD(HE2)
TEL ES1885-021882-12 P/C SHIELD RING
TEL ES1886-455163-13 INDER ENCODER
TEL ES1886-455164-12 INDER WATER SENSOR(LASER)
TEL ES1886-455164-13 INDER WATER SENSOR (LASER)
TEL ES1886-455165-12 INDER WATER SENSOR(PHOTO DIODE)
TEL ES1886-455165-13 INDER WATER SENSOR (PHOTO DIODE)
TEL ES1886-455221-12 P/C WALL PT SENSOR
TEL ES1886-455291-11 CHUCK MOTOR ASSEMBLY
TEL ES1886-455292-11 MOTER (P/A TWEEZERS)
TEL ES1886-455294-1 MOTOR (P/A)
TEL ES1886-455441-11 RF CABLE
TEL ES1886-456363-12 ROTARY MOTOR AND ENCODER
TEL ES1886-456364-12 TENDER MOTOR AND ENCODER
TEL ES1886-457617-17 RF CABLE 10M (ES1D86-008352-12)
TEL ES1886-458247-11 HAM LIFTER CYLINDER (ESC) ASSY
TEL ES1886-461134-13 RF GENERATOR-MFG-20A1
TEL ES1887-421988-11 GATE VALVE ASSEMBLY (IEM POLY)
TEL ES1A80-1016700-11 SERVICE BOX, Z-610PC-BNNN
TEL ES1D0-311007-12 TENSIonER GAP A1
TEL ES1D02-400026-11 SPROCKET DRIVE
TEL ES1D02-400026-11 SPROCKET DRIVE
TEL ES1D02-400215-11 SHIELD SPIRAL U-CHAM (S-DT)
TEL ES1D02-400262-11 SCREW BEARING
TEL ES1D05-200020-11 SHIELD DEPO
TEL ES1D05-200020C11 SHIELD, DEPO QU-A-3 (DRM2)
TEL ES1D05-200031-11 COVER..BAFFLE Q-L3(DRM2)
TEL ES1D05-300038-14 SHIELD DEPO DRM2
TEL ES1D05-300053-14 RING INSULATER B2 (DRM2)
TEL ES1D05-300083C13 PLATE UPPER QB FLAT
TEL ES1D05-300152-11 COVER..BAFFLE,Q-L,(DRM2)
TEL ES1D05-300152C11 COVER,BAFFLE,CESC
TEL ES1D05-300161-11 SHIELD, SUPPORT DEPO Q-S1
TEL ES1D05-300161C11 SHIELD,SUPPORT,DEPO,CESC
TEL ES1D05-300162C11 RING, FOCUS
TEL ES1D05-400022-14 WINDOW SHIELD DEPO DRM2
TEL ES1D05-400022C14 WINDOW SHIELD DEPO(DRM2)
TEL ES1D05-400028-11 WINDOW, UP A-2 (DRM)
TEL ES1D10-090515-TM COVER BELLOW A CE-Y FOR CE RAMIC
TEL ES1D10-100386-11 INSULATOR, BOTTOM P
TEL ES1D10-100670-13 ELECTRODE UPPER QB FLAT
TEL ES1D10-100907-12 BAFFLE PLATE
TEL ES1D10-100915-11 ELECTRODE UPPER QB. FLAT
TEL ES1D10-100938-12 RF PLATE,PC1 (DRM2)
TEL ES1D10-101111-11 RF PLATE,PC2 (DRM2)
TEL ES1D10-101446-22 PLATE,BAFFLE 0-12(DRM2)
TEL ES1D10-1014746-22 PLATE BAFFLE 0-12 (D RM2 )
TEL ES1D10-190272-TM COOLANT PIPE
TEL ES1D10-190477-TM base,DEPO SHIELD SUPPORT, E
TEL ES1D10-200705-14 UPPER, ELECTRODE, 1, (DRM2)
TEL ES1D10-200733-11 RING, SHIELD (DRM2)
TEL ES1D10-200921-12 DEPO SHIELD
TEL ES1D10-201429-15 UPPER,ELECTRODE R-1
TEL ES1D10-201588-12 UPPER ELECTRODE P (DRM2)
TEL ES1D10-201595-15 SHIELD, DEPOT 85L DRM2
TEL ES1D10-202177-12 UPPER ELECTRODE
TEL ES1D10-203753-12 RING, CENTERING-Y
TEL ES1D10-204310C11 200MM UPPER ELECTRODE MODIFIED
TEL ES1D10-301452-12 HOLDER,BEARING,(DRM2)
TEL ES1D10-302057-11 JIG, GAP (DRM2)
TEL ES1D10-302569-13 BRACKET..SLIDE,R,(DRM2)
TEL ES1D10-302586-12 COVER BELLOWS B
TEL ES1D10-302600-11 SUPPORT S-PIPE
TEL ES1D10-302869-11 PUSHER PIN
TEL ES1D10-302936-11 SHAFT RF INLET
TEL ES1D10-303014-12 SUPPORT SHIELD DEPO DRM2
TEL ES1D10-303124-16 DEPO SHIELD
TEL ES1D10-303124-M1 SHIELD, DEP
TEL ES1D10-303356-11 CASSETTE CHAMBER VACUUM PIPE
TEL ES1D10-303367-14 PIPE, TEE
TEL ES1D10-304039-11 FLLINE, HE/VAC
TEL ES1D10-305152-11 COVER , SCREW  TEFLON
TEL ES1D10-305523-12 PIPE HE-IEM-UP
TEL ES1D10-305996-11 IPE..HE1-8
TEL ES1D10-306221-13 JIG RING, 2 (DRM2)
TEL ES1D10-306628-11 WINDOW DEPO DRM2
TEL ES1D10-308722-11 RING, FOCUS, SEASONED
TEL ES1D10-311007-12 TENSIonER GAP A1
TEL ES1D10-311008-11 TENSIonER GAP B1
TEL ES1D10-311117-12 PIPE PN2-CC-3
TEL ES1D10-311258-11 COVER,BEL-L(C-ESC)
TEL ES1D10-311259-11 COVER,BEL-S,(C-ESC)
TEL ES1D10-311259-11 COVER,BEL-S,(C-ESC)
TEL ES1D10-311745-13 RING, BELLOWS UPPER
TEL ES1D10-311758-11 RING, BELLOWS LOWER
TEL ES1D10-312197 RING, FOCUS, (C-ESC 4.0MM SIC)
TEL ES1D10-312197-11 RING, FOCUS, (C-ESC 4.0MM SIC)
TEL ES1D10-312204-11 RING, FOCUS, (C-ESC 3.4MM SIC)
TEL ES1D10-313045-11 RING..F-8S-GC-260-3.2
TEL ES1D10-314780-12 RING BELLOW ME CHAMBER
TEL ES1D10-390020-TM GASKET
TEL ES1D10-390510-TM WINDOW,UPPER WALL EPD
TEL ES1D10-390540-TM PLUG DEPO SHIELD FOR CERAM IC
TEL ES1D10-390908-TM LIFTER T-HANDLE
TEL ES1D10-401239-11 SHAFT DRIV FOR CHAIN
TEL ES1D10-401722-11 COVER,ESC
TEL ES1D10-402032-11 BUSH P-PIN
TEL ES1D10-402033-11 SUPPORT BUSH
TEL ES1D10-402043-11 SUPPORT S-PIPE
TEL ES1D10-402047-11 BUSH..PIPE,COOLING,(DRM2)
TEL ES1D10-404150-11 SLEEVE, A DRM2 E
TEL ES1D10-404281-12 PIPE UEL A (DRM2)
TEL ES1D10-404854-11 GUIDE, CE-ESC, DRM2C (PACK OF 10)
TEL ES1D10-405369-11 base IDLE A
TEL ES1D10-405373-12 COLLAR C-1(DRM2)
TEL ES1D10-406875-11 PIN SUPPORT Q-S1(DRM2)
TEL ES1D10-406876-11 PIN SUPPORT Q-S2(DRM2)
TEL ES1D10-407211-11 SHEET SUPPORT-125(DRM2)
TEL ES1D10-407410-11 COLLAR D-2
TEL ES1D1805-320140-11 COVER, RING INNER TEL SCCM -
TEL ES1D80-000626-1X APC BOARD
TEL ES1D80-000700-11 EPD,FIBER
TEL ES1D80-000999-11 PUSH MOTOR DRIVER
TEL ES1D80-001025-11 NESLAB COOLING TYPE CHILLER
TEL ES1D80-001878-12 LEN EPD TYPE2
TEL ES1D80-002077-12 XFR SYS..BC930197 SRC2/014
TEL ES1D80-002201-12 XFR SYS RELAY BOX
TEL ES1D80-002331-12 GATE VALVE
TEL ES1D80-002332-12 VALVE GATE
TEL ES1D80-002336-12 VALVE GATE
TEL ES1D80-002751-11 ANGLE VALVE, XLA-40-X519
TEL ES1D80-002787-12 BA GAUGE LEYBOLD ITR100-T
TEL ES1D80-002858-11 ENDPOINT CABLE
TEL ES1D80-002917-11 BREAK FILTER
TEL ES1D80-003560-11 REGULATOR
TEL ES1D80-004121-25 MATCHER,,AMN-30C11
TEL ES1D81-000049-13 PCB PRESSURE SWITCH I/F BOARD
TEL ES1D81-000065-27 PCB AC POW FAIL DET BOARD B
TEL ES1D81-000088-11 PCB ASSEMBLY TV B0008-1/VMIF
TEL ES1D81-000092-16 PCB ASSEMBLY TYB121-1/COM
TEL ES1D81-000097-A5 PCB ASSEMBLY TYB212-A/FR
TEL ES1D81-000098-B2 PCB ASSEMBLY TYB 112-BDIO
TEL ES1D81-000098-B4 BRD, ASSY, TYB112-B/DIO
TEL ES1D81-000098-B8 PCB, TYB-111B/DIO
TEL ES1D81-000099-A5 PCB ASSEMBLY TYB111-A/MAIO
TEL ES1D81-000104-14 PCB TYB411-1/TC
TEL ES1D81-000113-17 PCB ASSEMBLY TYB221-1/PUMP
TEL ES1D81-000118-15 PCB TYB417-1/OPE
TEL ES1D81-000130-19 PCB, TYB416-1/PUMP
TEL ES1D81-000136-22 PCB TYB223-2/SW
TEL ES1D81-000137-12 TENER CARD
TEL ES1D81-000142-17 TYB41F-1 P/C
TEL ES1D81-000292-14 PCB TYB412-1/CC
TEL ES1D81-000293-11 PCB TYB31D-1/TC
TEL ES1D81-000302-11 I/FBOARD
TEL ES1D85-009005-13 88DRM GROOVE ESC
TEL ES1D86-003374-15 CABLE TC , CONv (T/C)
TEL ES1D86-003597-12 HEATER,ASSY
TEL ES1D86-003599-12 HEAT WALL RELAY CABLE
TEL ES1D86-003676-12 PC 1 SENSOR CABLE
TEL ES1D86-003775-14 ESC HIGH VOLTAGE CABLE
TEL ES1D86-003812-13 SENSOR, PC, PC2 WALL PT
TEL ES1D86-003814-12 SENSOR ASSY PC/PC2
TEL ES1D86-003950-12 CABLE,GHOST COMMUNICATION
TEL ES1D86-004358-12 T/C
TEL ES1D86-006761-21 RF CABLE
TEL ES1D86-006888-11 SENSOR, PC PC1 COVER OPEN
TEL ES1D86-006888-11 SENSOR, PC PC1 COVER OPEN
TEL ES1D86-006889-11 SENSOR, PC, PC2 COVER OPEN
TEL ES1D86-009061-13 TC/SENSOR PC 1 BOTTOM
TEL ES1D86-009062-13 T/C SENSOR
TEL ES1D86-017747-11 SENSOR, PRESSURE, 622A01TDE
TEL ES1D86-050199-11 CABLE ASSY..HDD base(SIG)
TEL ES1D86-092740-TM CA:31D/CN14 TO417/CN2
TEL ES1D87-000832-12 MonOCHRO UNIT, EPD BOX
TEL ES1N10-402337-11 PIN POSITIONING
TEL ES1N80-000067-13 RF GENERATOR, OEM-10B-8
TEL ES203-001757-1 SPACER=0.4MM
TEL ES3D10-302567-12 TRACTOR FOCUS RING
TEL ES802-420023-1 ConNECTOR ADD WORK
TEL ES810-220644-1 GATE
TEL ES810-220689-1 BAFFLE B (8K)
TEL ES810-220690-2 BAFFLE C (8K)
TEL ES810-321363-1 WIRE ASSEMBLY
TEL ES810-420062-1 SUPPORT, SHAFT, CLAMP
TEL ES810-420072-1 LANTERN RING (6 DIA)
TEL ES810-420170-1 COLLAR (12-6.2)
TEL ES810-420197-2 RING BACKUP GATE
TEL ES810-420212-1 LANTERN RING
TEL ES810-420595-1 RF CONNECTOR
TEL ES810-420901-1 SCREW BRACKET
TEL ES810-420924-1 SHIELD BUSHING
TEL ES810-420950-1 LIMIT FLAG
TEL ES810-420951-1 ConNECT BLOCK
TEL ES810-422081-1 BACK UP RING